• kSA 400 - in situ film growth RHEED analysis
• kSA ACE - in situ atomic flux rate control
• kSA BandiT - in situ Band Edge Thermometry (BET)
• kSA ICE - in situ wafer temperature, reflectivity, growth rate, stress, and curvature
• kSA MOS - in situ 2D wafer curvature and stress
• kSA MOS UltraScan - ex situ wafer curvature, stress, tilt, bow height, warp
• kSA MOS ThermalScan - ex situ wafer curvature, stress, tilt, bow height, warp with temperature control
• kSA SpectR - in situ wafer thin film thickness, reflectivity, and optical constants
• kSA SpectraTemp - in situ absolute temperature

Stop by our booth to learn how kSA products will benefit your process - or visit us at: www.k-space.com