Prof. Richard Fu

Faculty of Engineering and Environment, University of Northumbria at Newcastle, UK
Richard Fu is a professor in the University of Northumbria at Newcastle. He was a lecturer in Heriot-Watt University, Edinburgh (2007-2010), and then a Reader in Thin Film Centre in University of West of Scotland (2011-2015), Glasgow, before moving to Newcastle, UK in 2015. He has extensive experience in smart thin films/coating materials, biomedical microdevices, energy materials, lab-on-chip, micromechanics, MEMS, nanotechnology, sensors and microfluidics. He published over 500 science citation index (SCI) journal papers, two books, 20 book chapters, and over 120 conference papers. His current Google scholar H-index is 76 with over 28K citations. He is associate editors/editorial board members for seven international journals, and has co-organized 12 international conferences worldwide.

Talk title: Smart thin film materials for MEMS and microsystem applications
This talk will focus on design, fabrication, and applications of micro-engineering and nanostructuring of smart materials and thin films for MEMS, smart microsystems. These include smart materials and film/coatings, integrated sensors, microactuators, microfluidic and lab-on-chip. The selected examples for these smart materials include superhard and tough material design and processing, shape memory alloy films and microactuators and nanocomposite shape memory polymer which can be used for microsurgery and biomedical applications. Another key example is piezoelectric thin film materials which can be explored for microfluidics and lab-on-chips applications (with multiple functions such as biosensing, particle/cell concentrating and sorting, patterning, pumping, mixing, nebulization and jetting). The talk will also include fabrication of nanostructures and applications using thin film micro- and nano- engineering processes.