Recent efforts to pattern or grow nanometer-scale superconducting structures have resulted in ground-breaking new devices, including SQUID-on-tip scanning probes, qubits for quantum information technology, and highly integrated Josephson junction networks. These structures have been realized using a variety of different techniques ranging from shadow evaporation, focused-electron and focused-ion-beam-induced deposition, focused-ion-beam milling and material modification, to more conventional optical and electron-beam lithography. Exceptionally small feature sizes, down to a few nanometers, have been achieved. This capability enables the production of structures on the length-scale of quantum mechanical tunnel barriers, allowing for the fabrication of quantum devices. In the case of Focused-ion-beam-based techniques, this high resolution is combined with the ability to make three-dimensional structures – by either milling or growth – as well as to pattern on unconventional non-planar surfaces, such as high-aspect-ratio scanning probe tips. Such developments may open the door to a new generation of superconducting devices with high spatial resolution, high sensitivity, and advanced functionality.
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